JPS63127293U - - Google Patents
Info
- Publication number
- JPS63127293U JPS63127293U JP1736487U JP1736487U JPS63127293U JP S63127293 U JPS63127293 U JP S63127293U JP 1736487 U JP1736487 U JP 1736487U JP 1736487 U JP1736487 U JP 1736487U JP S63127293 U JPS63127293 U JP S63127293U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrode
- electrodes
- plate
- piezoelectric actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1736487U JPH069593Y2 (ja) | 1987-02-09 | 1987-02-09 | 圧電アクチユエ−タ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1736487U JPH069593Y2 (ja) | 1987-02-09 | 1987-02-09 | 圧電アクチユエ−タ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63127293U true JPS63127293U (en]) | 1988-08-19 |
JPH069593Y2 JPH069593Y2 (ja) | 1994-03-09 |
Family
ID=30810055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1736487U Expired - Lifetime JPH069593Y2 (ja) | 1987-02-09 | 1987-02-09 | 圧電アクチユエ−タ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH069593Y2 (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021197798A (ja) * | 2020-06-11 | 2021-12-27 | 株式会社新生工業 | アクチュエータ |
-
1987
- 1987-02-09 JP JP1736487U patent/JPH069593Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021197798A (ja) * | 2020-06-11 | 2021-12-27 | 株式会社新生工業 | アクチュエータ |
Also Published As
Publication number | Publication date |
---|---|
JPH069593Y2 (ja) | 1994-03-09 |